4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
نویسندگان
چکیده
Charlie V. Lam Boston Micromachines Corporation 30 Spinelli Place Cambridge, Massachusetts 02138 Abstract. We present the progress in the development of a 4096element microelectromechanical systems !MEMS" deformable mirror, fabricated using polysilicon surface micromachining manufacturing processes, with 4 !m of stroke, a surface finish of "10 nm rms, a fill factor of 99.5%, and a bandwidth of #5 kHz. The packaging and highspeed drive electronics for this device, capable of frame rates of 22 kHz, are also presented. © 2009 Society of Photo-Optical Instrumentation Engineers. #DOI: 10.1117/1.3158067$
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A 4096 Element Continuous Facesheet MEMS Deformable Mirror for High-Contrast Imaging
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